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US 9,287,453 B2Granted
Composite substrates and functional device
AssigneeNGK Insulators, Ltd.
InventorsMakoto Iwai, Katsuhiro Imai, Masahiro Sakai
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Abstract
In the case that a functional layer, made of a nitride of a group 13 element, is formed on a composite substrate including a sapphire body and a gallium nitride crystal layer disposed over the sapphire body, the deviation of the function is prevented. The composite substrate 4 includes a sapphire body 1A and a gallium nitride crystal layer 3 disposed over the sapphire body. Aa warpage of the composite substrate is in a range of not less than +40 μm and not more than +80 μm per 5.08 cm in length.
Claims7
A composite substrate comprising:
- a sapphire body;
- and
- a gallium nitride crystal layer disposed over said sapphire body,
- wherein a warpage of said composite substrate is in a range of not less than +40 μm and not more than +80 μm per 5.08 cm in length.
1 more element
Dependencies are inferred from the claim text.