Apparatus and method for monitoring the process of fabricating solar cells
AssigneeTSMC Solar Ltd.
InventorsChung-Hsien Wu, Hung-Yu Chang
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AssigneeTSMC Solar Ltd.
InventorsChung-Hsien Wu, Hung-Yu Chang
Estimating the term…
A method for monitoring the process of fabricating solar cells generally comprises performing a reaction process in a chamber for a solar cell substructure, wherein the chamber includes a reaction solution that includes at least one chemical component. A concentration value is detected for the chemical component during the reaction process, via a detection assembly that is coupled to the chamber. The method further includes determining whether the detected concentration value is at a predefined threshold concentration level or within a predefined concentration range for the chemical component, via a control assembly that is coupled to the detection assembly. The concentration of the chemical component within the reaction solution is modified, during the reaction process, when the detected concentration value is different from the predefined threshold concentration level or different from the predefined concentration range.
A method for monitoring the process of fabricating solar cells, said method comprising:
A monitoring apparatus comprising:
A solar cell fabrication system comprising:
Dependencies are inferred from the claim text.