Oxide semiconductor film and formation method thereof
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorShunpei Yamazaki
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Abstract
To provide a crystalline oxide semiconductor film, an ion is made to collide with a target including a crystalline In—Ga—Zn oxide, thereby separating a flat-plate-like In—Ga—Zn oxide in which a first layer including a gallium atom, a zinc atom, and an oxygen atom, a second layer including an indium atom and an oxygen atom, and a third layer including a gallium atom, a zinc atom, and an oxygen atom are stacked in this order; and the flat-plate-like In—Ga—Zn oxide is irregularly deposited over a substrate while the crystallinity is maintained.
Claims15
An oxide semiconductor film comprising:
- a plurality of plate particles each including indium, gallium, zinc, and oxygen,
- wherein the plurality of plate particles are arranged irregularly, and
- wherein the plurality of plate particles each have regularity in atomic arrangement.
A semiconductor device comprising:
- a gate electrode;
- an oxide semiconductor film;
- a gate insulating layer between the gate electrode and the oxide semiconductor film;
- and
- a source electrode and a drain electrode each electrically connected to the oxide semiconductor film,
- wherein the oxide semiconductor film comprises a plurality of plate particles each having a structure in which layers including a gallium atom, a zinc atom, and an oxygen atom are provided over and under a layer including an indium atom and an oxygen atom, and
- wherein the plurality of plate particles are arranged irregularly.
A method for forming an oxide semiconductor film, comprising the steps of:
- separating a plurality of plate particles from a target including indium, gallium, and zinc, wherein the plurality of plate particles each includes indium, gallium, zinc, and oxygen;
- and
- depositing the plurality of plate particles over a substrate irregularly,
- wherein the plurality of plate particles each have regularity in atomic arrangement.
Dependencies are inferred from the claim text.