US 9,287,344 B2 · Monolithic magnetic induction device

Abstract

Providing for a monolithic magnetic induction device having low DC resistance and small surface area is described herein. By way of example, the magnetic induction device can comprise a substrate (e.g., a semiconductor substrate) having trenches formed in a bottom layer of the substrate, and holes formed in the substrate between the trenches and an upper layer of the substrate. Additionally, the magnetic induction device can comprise a conductive coil embedded or deposited within the trenches. The magnetic induction device can further comprise a set of conductive vias formed in the holes that electrically connect the bottom layer of the substrate with the upper layer. Further, one or more integrated circuit components, such as active devices, can be formed in the upper layer, at least in part above the conductive coil. The vias can be utilized to connect to integrated circuit components with the conductive coil, where suitable.

Claims41

Dependent claims

A magnetic induction device for an integrated circuit, comprising:

a semiconductor substrate having a first surface, and a second surface opposite the first surface, wherein a distance from the first surface to the second surface is equal to a thickness of the semiconductor substrate;
a conducting coil that forms a set of turns embedded within the semiconductor substrate and that extends from the first surface to a first depth within the semiconductor substrate that is less than the thickness of the semiconductor substrate;
and
one or more conductive vias, that substantially fills one or more respective holes in the semiconductor substrate, and that extends from the second surface to the first depth, a first end of at least one of the one or more conductive vias being embedded within the semiconductor substrate at the first depth and in physical contact with the conducting coil, to a second end at the second surface of the semiconductor substrate;
wherein the set of turns embedded within the semiconductor substrate formed by the conductive coil is exclusive of the one or more conductive vias.

2 more elements

Dependencies are inferred from the claim text.

Monolithic magnetic induction device

Life of this patent

Monolithic magnetic induction device

Life of this patent

Abstract

Claims41