Method and apparatus for a seal ring structure
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTing-Ying Chen, Yi Hsun Chiu, Ching-Hou Su, Chyi-Tsong Ni
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTing-Ying Chen, Yi Hsun Chiu, Ching-Hou Su, Chyi-Tsong Ni
Estimating the term…
A wafer seal ring may be formed on a first and/or a second wafer. One or both of the first and/or second wafers may have one or more dies formed thereon. The wafer seal ring may be formed to surround the dies of a corresponding wafer. One or more die seal rings may be formed around the one or more dies. The wafer seal ring may be formed to a height that may be approximately equal to a height of one or more die seal rings formed on the first and/or second wafer. The wafer seal ring may be formed to provide for eutectic or fusion bonding processes. The first and second wafers may be bonded together to form a seal ring structure between the first and second wafers. The seal ring structure may provide a hermetic seal between the first and second wafers.
An apparatus comprising:
An apparatus comprising:
A method comprising:
Dependencies are inferred from the claim text.