Apparatus and method of controlling chuck, and exposure apparatus and control method thereof
AssigneeSamsung Display Co., Ltd.
InventorsJa Yul Kim, Sang Don Jang, Tae Kyu Son
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Abstract
Exemplary embodiments of the invention disclose an exposure apparatus and a method of tuning parameters of a chuck, which may reduce a time taken to level the chuck by previously tuning parameters of the chuck. The method of tuning parameters of a chuck includes detecting a tilt component of the chuck, performing chuck tilt adjustment to minimize the tilt component of the chuck, and tuning the parameters of the chuck if a residual tilt component is present after performing the chuck tilt adjustment.
Claims16
A method of tuning parameters of a chuck, comprising:
- detecting a tilt component of the chuck;
- adjusting a position of the chuck to remove, at least, partially, the tilt component of the chuck;
- and
- tuning at least one parameter of the chuck if a residual tilt component of the chuck is present after adjusting the position of the chuck,
- wherein the at least one parameter comprises a parameter using coordinates of actuators of the chuck, the actuators of the chuck being actuators for moving the chuck in a direction perpendicular to a top surface of the chuck.
A method of tuning parameters of a chuck, comprising:
- detecting a tilt component of the chuck;
- adjusting a position of the chuck to remove, at least partially, the tilt component of the chuck;
- and
- if a residual tilt component of the chuck is present after adjusting the position of the chuck, adjusting the position of the chuck, and tuning a scaling parameter and a coordinate parameter of the chuck.
A method of tuning parameters of a chuck, comprising:
- detecting a tilt component of the chuck;
- adjusting a position of the chuck to remove, at least, partially, the tilt component of the chuck;
- and
- tuning at least one parameter of the chuck if a residual tilt component of the chuck is present after adjusting the position of the chuck,
- wherein detecting the tilt component of the chuck comprises:
- obtaining a first focus value vector Zk associated with first measuring coordinates Ps;
- obtaining a first plane coefficient vector based on the first measuring coordinates Ps and the first focus value vector Zk;
- and
- determining a first drive amount vector Za based on the first plane coefficient vector and coordinates of at least three actuators of the chuck.
Dependencies are inferred from the claim text.