Semiconductor baking apparatus and operation method thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHsin-Kai Chen, Hung-Chih Wang, Hon-Lin Huang, Shih-Chi Lin
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Abstract
A semiconductor baking apparatus includes a load lock chamber, a process chamber, a transfer chamber, a first interior door, and a controller. The process chamber has a first accommodating space therein. The transfer chamber has a second accommodating space therein, and the transfer chamber is connected to the load lock chamber and the process chamber. The first interior door is between the process chamber and the transfer chamber. When the first interior door is opened, the first accommodating space is communicated with the second accommodating space. The controller is programmed to open the first interior door when the semiconductor baking apparatus idles.
Claims20
A semiconductor baking apparatus comprising:
- a load lock chamber;
- a process chamber having a first accommodating space therein;
- a transfer chamber having a second accommodating space therein and connected to the load lock chamber and the process chamber;
- a first interior door between the process chamber and the transfer chamber, wherein when the first interior door is opened, the first accommodating space is communicated with the second accommodating space;
- and
- a controller programmed to open the first interior door when the semiconductor baking apparatus idles.
Dependencies are inferred from the claim text.