Wafer Handling Robot
AssigneeNabtesco Corporation
InventorMitsuru Shimamoto
Life of this patent
Estimating the term…
Abstract
A wafer handling robot includes a body and an arm having a plurality of links. A wafer holder is provided on one end of the arm. A base of the arm serves as a drive link and is rotatably connected to the body. The arm is configured such that, when the drive link is rotated by a motor, the arm end is constrained to move along a straight or curved trajectory. A starting point and an end point of the trajectory are located equal distantly from a center of rotation of the drive link. Further, the direction of the arm end at the starting point is a mirror image of the direction of the arm end at the end point with respect to a straight reference line passing through the center of rotation and a middle point between the starting and the end points.
Claims8
A wafer handling robot comprising:
- a body,
- an arm having a drive link and at least one driven link coupled thereto, the drive link being rotatably connected to the body and an arm end being defined on the at least one driven link,
- a constraint point mounted on the body such that the constraint point is not movable relative to the body while the wafer handling robot is transferring a wafer,
- a semiconductor wafer holder attached to the arm end, and
- an actuator configured to rotate the drive link,
- wherein:
- the arm further includes a link mechanism configured to restrict motion of the arm end, caused by rotation of the drive link, to a straight or curved trajectory;
- the at least one driven link is engaged with the constraint point, such that said at least one driven link is slidable relative to the constraint point along a longitudinal direction of the at least one driven link;
- a starting point and an end point of the trajectory of the arm end are positioned equal distantly from a center of rotation of the drive link;
- and
- the arm end, when disposed at the starting point, is oriented in a mirror image of the arm end, when disposed at the end point, with respect to a straight reference line passing through the center of rotation and a middle point between the starting and the end points.
A wafer handling robot comprising:
- a body,
- a drive link having a first end and a second end,
- a driven link having a first end, a second end and a slit extending along a center line in its longitudinal direction, the second end of the drive link being pivotably coupled to the second end of the driven link,
- a semiconductor wafer holder fixedly attached to the first end of the driven link,
- a motor fixedly coupled to the body and configured to rotate the first end of the drive link about a center of rotation,
- a roller supported by the body via first and second sub-actuators, the roller being slidably engaged within the slit of the driven link,
- wherein:
- the first and second sub-actuators are configured to move the roller within an XY plane containing a movement path of the driven link,
- a starting point and an end point of the trajectory of the first end of the driven link are positioned equal distantly from the center of rotation of the drive link;
- and
- the semiconductor wafer holder and the first end of the driven link, when disposed at the starting point, are respectively oriented in a mirror image of the semiconductor wafer holder and the first end of the driven link, when disposed at the end point, with respect to a straight reference line extending along the straight rail and passing through the center of rotation, the straight reference line intersecting a middle point between the starting and the end points.
Dependencies are inferred from the claim text.