Substrate support with advanced edge control provisions
AssigneeApplied Materials, Inc.
InventorsKyle Tantiwong, Samer Banna
Life of this patent
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Abstract
Embodiments of the present invention generally provide an apparatus with a recess and a cavity formed therein for future hardware retrofit and uniformity enhancement and methods for controlling the same. In one embodiment, a substrate support includes a supporting body having an outer wall, a ground path disposed against and bounding the outer wall of the supporting body, a mounting plate coupled to a lower surface of the supporting body, wherein the mounting plate includes a lip extending outward from the mounting plate defining an upper surface; and a recess formed at a perimeter of the supporting body above the upper surface of the lip of the mounting plate, the recess lining on the ground path extending at least partially to the mounting plate.
Claims20
A substrate support, comprising:
- a supporting body having an outer wall;
- a ground path disposed against and bounding the outer wall of the supporting body;
- a mounting plate coupled to a lower surface of the supporting body, wherein the mounting plate includes a lip extending outward from the mounting plate defining an upper surface;
- and
- a recess formed at a perimeter of the supporting body above the upper surface of the lip of the mounting plate, the recess on the ground path extending at least partially to the mounting plate, wherein the supporting body comprises:
- a substrate supporting plate;
- a cooling plate coupled to the substrate supporting plate;
- an inlet/outlet plate coupled to the cooling plate;
- and
- a base plate coupled to the inlet and outlet plate.
A substrate support, comprising:
- a supporting body;
- a mounting plate coupled to the supporting body;
- and
- at least one cavity defined in the mounting plate extending at least partially into a main chassis coupled to the supporting body, wherein the cavity is formed in a position in the mounting plate outward from lift pins disposed in the mounting plate, wherein the supporting body comprises:
- a substrate supporting plate;
- a cooling plate coupled to the substrate supporting plate;
- an inlet/outlet plate coupled to the cooling plate;
- and
- a base plate coupled to the inlet and outlet plate.
A substrate support, comprising:
- a supporting body;
- a ground plate coupled to the supporting body;
- a mounting plate coupled to the ground plate, wherein the mounting plate has a lip extending outward from the mounting plate, defining a recess above the lip of the mounting plate circumscribing the supporting body and the ground plate;
- and
- at least one cavity formed between the mounting plate and a main chassis coupled to the mounting plate, wherein the supporting body comprises:
- a substrate supporting plate;
- a cooling plate coupled to the substrate supporting plate;
- an inlet/outlet plate coupled to the cooling plate;
- and
- a base plate coupled to the inlet and outlet plate.
Dependencies are inferred from the claim text.