System and methods for plasma application
AssigneeColorado State University Research Foundation
InventorsIl-Gyo Koo, Cameron A. Moore, George J. Collins, Jin-Hoon Cho
Life of this patent
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Abstract
A plasma system includes a plasma device, an ionizable media source, and a power source. The plasma device includes an inner electrode and an outer electrode coaxially disposed around the inner electrode. The inner electrode includes a distal portion and an insulative layer that covers at least a portion of the inner electrode. The ionizable media source is coupled to the plasma device and is configured to supply ionizable media thereto. The power source is coupled to the inner and outer electrodes, and is configured to ignite the ionizable media at the plasma device to form a plasma effluent having an electron sheath layer about the exposed distal portion.
Claims18
A plasma system, comprising:
- a plasma device including:
- an outer electrode having an inner surface and a first coating including a first type of material, the first coating disposed on at least a portion of the inner surface;
- and
- an inner electrode disposed within the outer electrode and having an outer surface and a second coating including a second type of material different from the first type of material, the second coating disposed on at least a portion of the outer surface;
- an ionizable media source coupled to the plasma device and configured to supply ionizable media thereto;
- and
- a power source coupled to the inner electrode and the outer electrode and configured to ignite the ionizable media to form a plasma effluent having an electron sheath layer about a distal end portion of the inner electrode.
A plasma device configured to receive ionizable media, comprising:
- an outer electrode having an inner surface and a first coating including a first type of material, the first coating disposed on at least a portion of the inner surface;
- and
- an inner electrode disposed within the outer electrode and having an outer surface and a second coating including a second type of material different from the first type of material, the second coating disposed on at least a portion of the outer surface.
Dependencies are inferred from the claim text.