Aberration corrector and charged particle beam apparatus using the same
AssigneeHitachi High-Technologies Corporation
InventorsZhaohui Cheng, Hideo Kashima, Hiroaki Baba, Takeyoshi Ohashi, Tomonori Nakano, Kotoko Urano, Naomasa Suzuki
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Abstract
Provided are an aberration corrector that reduces irregularity of a magnetic field of a multipole to obtain an image of high resolution and a charged particle beam apparatus using the same. The aberration corrector includes a plurality of magnetic field type poles, a ring that magnetically connects the plurality of poles with one another and an adjustment member disposed between the pole and the ring to adjust a spacing between the pole and the ring per pole.
Claims15
An aberration corrector, comprising:
- a plurality of magnetic field type poles;
- a ring that magnetically connects the plurality of poles with one another, and
- an adjustment member disposed between the pole and the ring to adjust a spacing between the pole and the ring per pole.
A charged particle beam apparatus, comprising:
- a sample stage:
- a charged particle source that generates charged particles to be radiated to a sample to be placed on the sample stage;
- a charged particle beam optical system that radiates the charged particles to the sample as a particle beam, and
- an aberration corrector adapted to correct an aberration of the particle beam, the aberration corrector including a plurality of magnetic field type poles, a ring that magnetically connects the plurality of poles with one another and an adjustment member disposed between the pole and the ring to adjust a spacing between the pole and the ring per pole.
Dependencies are inferred from the claim text.