Charged particle beam apparatus
AssigneeHitachi High-Technologies Corporation
InventorsKenichi Morita, Sayaka Tanimoto, Makoto Sakakibara, Muneyuki Fukuda, Naomasa Suzuki, Kenji Obara
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Abstract
A charged particle beam apparatus includes a charged particle beam source which irradiates a sample with a charged particle beam, an electromagnetic lens, a lens control electric source for controlling strength of a convergence effect of the electromagnetic lens; and a phase compensation circuit which is connected to the lens control electric source in parallel with the electromagnetic lens, and controls a lens current at the time of switching the strength of the convergence effect of the electromagnetic lens such that the lens current monotonically increases or monotonically decreases.
Claims12
A charged particle beam apparatus, comprising:
- a charged particle beam source which irradiates a sample with a charged particle beam;
- an electromagnetic lens;
- a lens control electric source for controlling strength of a convergence effect of the electromagnetic lens;
- and
- a phase compensation circuit which is connected to the lens control electric source in parallel with the electromagnetic lens, and controls a lens current at the time of switching the strength of the convergence effect of the electromagnetic lens such that the lens current monotonically increases or monotonically decreases.
Dependencies are inferred from the claim text.