Apparatus for dynamic temperature control of an ion source

An apparatus, comprising:

• an ion source having a plurality of walls defining a chamber, wherein the plurality of walls comprises a bottom wall, a top wall with an aperture, two end walls and two side walls, where a cathode is disposed proximate one of the two end walls;
• two movable heat shields, each disposed outside the chamber and proximate a respective one of the two side walls, where each of the two movable heat shields has a first position where a first amount of heat is reflected back toward the chamber and a second position where a second amount of heat is reflected back toward the chamber, where the second amount is less than the first amount;
• and
• an actuator in communication with each of the movable heat shields, to move each of the movable heat shields in a direction parallel to a plane of the side walls between the first position and the second position, wherein in the first position, the movable heat shields overlap a portion of the side walls, and in the second position, the movable heat shields overlap a smaller portion of the side walls.

An apparatus, comprising:

• an ion source having a plurality of walls defining a chamber, wherein the plurality of walls comprises a bottom wall, a top wall with an aperture, two end walls and two side walls, where a cathode is disposed proximate one of the two end walls;
• two movable heat shields, each disposed outside the chamber and proximate a respective one of the two side walls, where each of the movable heat shields has a first position where a first amount of heat is reflected back toward the chamber and a second position where a second amount of heat is reflected back toward the chamber, the second amount being less than the first amount;
• and
• an actuator in communication with each of the movable heat shields, to rotate each of the movable heat shields about a respective pivot point, wherein in the first position, the movable heat shields form a first angle with the respective side wall, and in the second position, the movable heat shields form a second angle with the respective side wall, greater than the first angle.