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US 9,287,050 B2Granted
MEMS and method of manufacturing the same
AssigneeKabushiki Kaisha Toshiba
InventorTomohiro Saito
Life of this patent
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Abstract
According to one embodiment, a MEMS includes a first electrode, a first auxiliary structure and a second electrode. The first electrode is provided on a substrate. The first auxiliary structure is provided on the substrate and adjacent to the first electrode. The first auxiliary structure is in an electrically floating state. The second electrode is provided above the first electrode and the first auxiliary structure, and is driven in a direction of the first electrode.
Claims18
A micro-electro-mechanical system (MEMS) comprising:
- a first electrode provided on a substrate;
- a first auxiliary structure provided on the substrate and adjacent to the first electrode, and being in an electrically floating state;
- and
- a second electrode provided above the first electrode and the first auxiliary structure, and being driven in a direction of the first electrode,
- wherein a lower surface of the second electrode which is located above an outside of an outer end of the first auxiliary structure has a curved portion, and
- the first auxiliary structure is arranged to surround the first electrode.
3 more elements
A micro-electro-mechanical system (MEMS) comprising:
- a first electrode provided on a substrate;
- a first auxiliary structure provided on the substrate and adjacent to the first electrode, and being in an electrically floating state;
- and
- a second electrode provided above the first electrode and the first auxiliary structure, and being driven in a direction of the first electrode,
- wherein the first auxiliary structure is provided to prevent the second electrode from deforming, and
- the first auxiliary structure is arranged to surround three sides of the first electrode.
3 more elements
Dependencies are inferred from the claim text.