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US 9,286,988 B2Granted
Nonvolatile memory device and operating method thereof
AssigneeSK hynix Inc.
InventorsSeiichi Aritome, Hyun-Seung Yoo, Sung-Jin Whang
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Abstract
A nonvolatile memory device includes a channel vertically extending from a substrate, a plurality of memory cells stacked along the channel; a source region connected to a first end portion of the channel, and a bit line connected to a second end portion of the channel, wherein the first end portion of the channel that adjoins the source region is formed as an undoped semiconductor layer or a semiconductor layer doped with P-type impurities.
Claims5
A method for operating a nonvolatile memory device, comprising:
- applying a negative erase voltage to a control gate electrode of a memory cell;
- and
- applying a first voltage higher than the negative erase voltage to a channel through a source region to erase charges stored in the memory cell through F-N tunneling,
- wherein the nonvolatile memory device comprises:
- the channel vertically extending from a substrate;
- a plurality of memory cells stacked along the channel;
- the source region connected to a first end portion of the channel;
- and
- a bit line connected to a second end portion of the channel,
- wherein the first end portion of the channel is formed as an undoped semiconductor layer or a semiconductor layer doped with P-type impurities,
- wherein the second end portion of the channel is formed of a semiconductor material of which a conductivity type is different from that of the first end portion, and
- wherein an intermediate portion of the channel is provided between the first end portion and the second end portion and is formed of a semiconductor material of which a conductivity type is the same as that of the first end portion.
9 more elements
Dependencies are inferred from the claim text.