Write pole formed with evaporation deposition
AssigneeSeagate Technology LLC
InventorsVenkateswara R. Inturi, Aly A. Bazama, Yong Luo, Joseph M. Mundenar
Life of this patent
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Abstract
A write pole may be formed by first depositing a dielectric layer onto a substrate and then patterning the dielectric layer to form a trench with a write pole shape. The trench is subsequently filled with the evaporation deposition of a magnetic material to form a write pole. The trench may have a greater depth dimension than width dimension.
Claims20
An apparatus comprising a trench defining a write pole shape, the trench continuously extending a first depth to a substrate, having a varying width along the first depth, and filled with a magnetic material via evaporation deposition.
A method comprising:
- depositing a dielectric layer onto a substrate;
- patterning the dielectric layer to form a trench with a write pole shape;
- and
- filling the trench with a magnetic material with evaporation deposition to form a write pole.
A method comprising:
- depositing a dielectric layer onto a substrate;
- patterning the dielectric layer to form a trench with a write pole shape;
- filling the trench with a magnetic material with evaporation deposition to form a write pole;
- removing portions of the dielectric layer;
- and
- forming at least one shield on the substrate adjacent the write pole.
Dependencies are inferred from the claim text.