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US 9,286,878 B2Granted
Transducer device having coupled resonant elements
AssigneeAvago Technologies General IP (Singapore) Pte. Ltd.
InventorsOsvaldo Buccafusca, Steven Martin
Life of this patent
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Abstract
A transducer device includes first and second resonant elements and a common coupling cavity. The first resonant element includes a first membrane arranged over a first cavity in a substrate and a first transducer structure stacked on the first membrane. The second resonant element includes a second membrane arranged over a second cavity in the substrate. The common coupling cavity is configured to couple acoustic signals from the first and second resonant elements.
Claims13
An acoustic transducer device, comprising:
- a first resonant element positioned on a substrate over a first cavity and having a first frequency response;
- a second resonant element positioned on the substrate over a second cavity adjacent to the first resonant element and having a second frequency response;
- and
- a mechanical coupler in contact with the first and second resonant elements, the mechanical coupler causing each of the first and second resonant elements to oscillate at frequencies other than the first and second frequency responses, respectively.
1 more element
An acoustic transducer device, comprising:
- a first resonant element comprising a first membrane arranged over a substrate and a first transducer structure stacked on the first membrane;
- a second resonant element comprising a second membrane arranged over the substrate;
- and
- a coupling beam contacting the first and second membranes and configured to couple acoustic signals from the first and second resonant elements, wherein the coupling beam is positioned over a gap formed between the coupling beam and a top surface of a center portion of the substrate.
1 more element
Dependencies are inferred from the claim text.