Method, structure and design structure for customizing history effects of SOI circuits
AssigneeGlobalfoundries Inc.
InventorsBrent A. Anderson, Edward J. Nowak
Life of this patent
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Abstract
A design structure is embodied in a machine readable medium for designing, manufacturing, or testing a design. The design structure includes a structure which comprises a high-leakage dielectric formed in a divot on each side of a segmented FET comprised of active silicon islands and gate electrodes thereon, and a low-leakage dielectric on the surface of the active silicon islands, adjacent the high-leakage dielectric, wherein the low-leakage dielectric has a lower leakage than the high-leakage dielectric. Also provided is a structure and method of fabricating the structure.
Claims13
A process for manufacturing an integrated circuit, the process comprising:
- translating inputs into a design structure embodied in a machine readable storage medium in a data format used for the exchange of layout data of integrated circuits and/or symbolic data format;
- and fabricating the integrated circuit defined by the design structure having manufacturing data, wherein the integrated circuit includes:
- a high-leakage dielectric on each of sides of a segmented field effect transistor (FET) comprised of active silicon islands and gate electrodes thereon;
- and
- a low-leakage dielectric on and in contact with a top surface of the active silicon islands, adjacent the high-leakage dielectric, a top surface of the high-leakage dielectric being at a coplanar level as the top surface of the active silicon islands;
- and
- a gate electrode material is within a divot of a shallow trench isolation material and is in direct contact with and between a portion of the shallow trench isolation material and the high-leakage dielectric, wherein the high-leakage dielectric is within the divot and on a side surface of the active silicon islands, wherein:
- the high-leakage dielectric, the low-leakage dielectric, the gate electrode material, and the shallow trench isolation material are completely above a buried oxide (BOX) layer;
- the gate electrodes are directly in contact with the shallow trench isolation material;
- and
- top surfaces of the gate electrode material and the shallow trench isolation material are formed at the coplanar level as the top surfaces of the high-leakage dielectric and the active silicon islands.
Dependencies are inferred from the claim text.