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US 9,285,668 B2Granted
MEMS micro-mirror device
AssigneeIntel Corporation
InventorsNicolas Abele, Faouzi Khechana, Lucio Kilcher
Life of this patent
Estimating the term…
Abstract
A MEMS micro-mirror device includes, a single package; a first mirror and second mirror, wherein at least one of the mirrors is configured to oscillate along an oscillation axis; wherein both mirrors are located within the single package and are arranged such that as the at least one mirror oscillates, the light incident on the first micro-mirror can be deflected to the second mirror.
Claims18
A MEMS micro-mirror device comprising,
- a single package having a cap member which defines a top surface of the single package and a base member which defines a bottom surface of the single package, the base member comprising a first transparent portion to allow light to enter the single package through the first transparent portion, the cap member comprising a second transparent portion to allow light to exit the single package through the second transparent portion;
- a first mirror and a second mirror located between the cap member and the base member and arranged to deflect light incident on the first mirror to the second mirror, at least one of the first mirror or the second mirror configured to oscillate along an oscillation axis;
- and
- one or more magnetic elements, at least one of the one or more magnetic elements to comprise an aperture.
1 more element
A method of manufacturing a MEMS micro-mirror device comprising the steps of:
- arranging the first mirror and second mirror within the single package, such that at least one of the first mirror or the second mirror is configured to oscillate along an oscillation axis and light incident on the first mirror to be deflected to the second mirror;
- providing one or more transparent windows in the single package which enable light to enter the single package through a rear end of the single package;
- and
- providing one or more magnetic elements, at least one of the one or more magnetic elements to comprise an aperture.
1 more element
A MEMS micro-mirror device comprising,
- a single package;
- a first mirror and second mirror, wherein at least one of the mirrors is configured to oscillate along an oscillation axis;
- wherein both mirrors are located within the single package and are arranged such that as the at least one mirror oscillates, the light incident on the first micro-mirror can be deflected to the second mirror;
- wherein the single package comprises one or more portions which are transparent to light, and wherein the one or more portions which are transparent to light are arranged to allow light to enter the single package from a rear end of the single package,
- wherein the MEMS micro-mirror device further comprises one or more magnetic elements, wherein the or each magnetic element has an aperture.
2 more elements
A MEMS micro-mirror device comprising:
- a single package comprising a front end and a rear end, the rear end comprising a first transparent portion to allow light to enter the single package through the rear end of the single package, the front end comprising a second transparent portion to allow light to exit the single package through the front end of the single package, the first transparent portion and the second transparent portion lie on different planes;
- a first mirror and a second mirror located between the front end and the rear end and arragned to deflect light incident on the first mirror to the second mirror, at least one of the first mirror or the second mirror to be configured to oscillate along an oscillation axis;
- and
- one or more magnetic elements, at least one of the one or more magnetic elements to comprise an aperture.
1 more element
A method comprising:
- receiving light from a laser source, the light received through a first transparent portion in a base member of a single package;
- deflecting light within the single package, the light at least partially deflected by a first mirror and a second mirror located between the base member and a cap member of the single package;
- oscillating at least one of the first mirror or the second mirror along an oscillation axis, the at least one of the first mirror or the second mirror to oscillate at least partially based on a magnetic element comprising an aperture;
- and
- transmitting light from a second transparent portion in the cap member.
2 more elements
Dependencies are inferred from the claim text.