Multiple beam combiner for laser processing apparatus

A radiation source, comprising:

• a beam combiner comprising a collecting optic, a collimating optic, and a correcting optic, wherein the collecting optic is an annular reflector, and the correcting optic reduces distortions of the combined radiation beam;
• more than two coherent radiation emitters, each coherent radiation emitter disposed to emit a radiation beam toward the beam combiner disposed to receive the radiation beams and emit a combined radiation beam, wherein each beam is received at the same angle of incidence with respect to an optical axis of the collimating optic;
• and
• a mode scrambler.

A radiation source, comprising:

• a beam combiner for combining a plurality of coherent beams into a single beam, the beam combiner comprising:
• a combined collecting optic and collimating optic, wherein the collimating optic has a collimating optical property;
• and
• a correcting optic;
• more than two coherent radiation emitters, each radiation emitter disposed to emit a radiation beam toward the beam combiner disposed to receive the radiation beams and emit a combined radiation beam.