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US 9,285,416 B2Granted
Apparatus and method for manufacturing substrates
AssigneesSamsung Electronics Co., Ltd., Semes Co., Ltd.
InventorsYoungchul Lee, Semin Kwon, JinHwan Lee, Jea-Muk Oh, Kyungsook Lee, Nam-Hong Lee
Life of this patent
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Abstract
A substrate manufacturing apparatus includes a test apparatus including a test handler module for performing a test process on a substrate. The test handler module may include a conveyor unit to transfer a substrate, a handler unit for performing a test process on the substrate, and a transfer unit for transferring the substrate between the conveyor unit and the handler unit. The conveyor unit may include a feed conveyor and a discharge conveyor spaced apart from the feed conveyor.
Claims19
A substrate manufacturing apparatus comprising:
- a first apparatus;
- a second apparatus;
- and
- a test apparatus including a test handler module for performing a test process on a substrate, wherein the first apparatus, the test apparatus, and the second apparatus are sequentially disposed in line,
- wherein the first apparatus comprises:
- a mount module to mount a device on the substrate;
- and
- a reflow module to perform a reflow process on the substrate on which the device is mounted,
- wherein the test handler module comprises:
- a conveyor unit to transfer a substrate;
- a handler unit to perform the test process on a plurality of unit substrates on the substrate;
- and
- a transfer unit, including a transfer robot, to transfer the substrate between the conveyor unit and the handler unit,
- wherein the conveyor unit comprises:
- a feed conveyor;
- and
- a discharge conveyor spaced apart from the feed conveyor to one side,
- wherein the second apparatus comprises a separating module to separate the plurality of unit substrates.
15 more elements
Dependencies are inferred from the claim text.