Test structure and methodology for estimating sensitivity of pressure sensors

A method comprising:

• forming a plurality of pressure sensors on a substrate, each of said pressure sensors including a sense cell having a first cavity;
• and
• forming only one test structure on said substrate, said test structure including a first capacitor structure and a second capacitor structure, said first capacitor structure having a first conductor plate, a second conductor plate, and an electrical insulator layer interposed between and in contact with each of said first and said second conductor plates, said first capacitor structure being formed without a cavity, and said second capacitor structure having a third conductor plate and a fourth conductor plate spaced apart by a second cavity.

A method comprising:

• forming a plurality of pressure sensors on a substrate laterally separated from one another by inactive regions, each of said pressure sensors including a sense cell having a first cavity;
• and
• forming a test structure on said substrate, said test structure including a first capacitor structure and a second capacitor structure, said first capacitor structure having a first conductor plate, a second conductor plate, and an electrical insulator layer interposed between and in contact with each of said first and said second conductor plates, said first capacitor structure being formed without a cavity, and said second capacitor structure having a third conductor plate and a fourth conductor plate spaced apart by a second cavity, wherein said forming said test structure includes forming said test structure on said substrate in one of said inactive regions.