Testing apparatus and method
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorKai-Yi Tang
Life of this patent
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Abstract
A test apparatus includes a DUT block, at least one probe and at least one variable-length pusher. The DUT block is used for allowing the DUT to be disposed thereon. The probe is located on the DUT block. The variable-length pusher is located above the probe. The actuator is used for moving the variable-length pusher to push against the DUT to force the DUT to be in electrical contact with the probe.
Claims20
An apparatus for testing a device under test (DUT), the apparatus comprising:
- a DUT block for allowing the DUT to be disposed thereon;
- at least one probe located on the DUT block;
- a plurality of variable-length pushers located above the probe, the variable-length pushers being individually compressible by different zones of the DUT to fit a shape of the DUT;
- and
- an actuator for moving the variable-length pushers to push against the DUT to force the DUT to be in electrical contact with the probe.
An apparatus for testing a device under test (DUT), the apparatus comprising:
- a DUT block for allowing the DUT to be disposed thereon;
- at least one probe located on the DUT block;
- a plurality of telescopic pushers located above the probe, the telescopic pushers being individually retractable by different zones of the DUT to fit a shape of the DUT;
- and
- an actuator for moving the telescopic pushers to push against the DUT to force the DUT to be in electrical contact with the probe.
A method for testing a device under test (DUT), the method comprising:
- disposing the DUT on at least one probe;
- and
- moving a plurality of variable-length pushers to push against the DUT, such that the variable-length pushers are individually compressed by different zones of the DUT to fit a shape of the DUT, and the DUT is forced to be in electrical contact with the probe.
Dependencies are inferred from the claim text.