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US 9,285,334 B2Granted
Hybrid dielectric moisture sensors
OwnerZhi David Cheninventor
Life of this patent
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Abstract
A moisture sensor includes a first electrode, a layer of porous insulating material including a plurality of pores, a film of dielectric sensing material covering the inner surfaces of the plurality of pores and a second electrode.
Claims20
A moisture sensor comprising:
- a first electrode having a face;
- a layer of porous insulating material having a first surface engaging said face, a second surface opposite said first surface and a plurality of pores;
- a film of dielectric sensing material covering and contacting inner surfaces of said plurality of pores and said second surface, wherein the film defines an open space within the inner surfaces of the pores;
- and
- a second electrode opposite the dielectric sensing material and the porous insulating material from the first electrode.
2 more elements
A moisture sensor, comprising:
- a substrate;
- a first electrode carried on said substrate, said first electrode having a first face;
- a barrier layer having a second face engaging said first face and a third face opposite said second face;
- a layer of porous insulating material having a first surface engaging said third face, a second surface opposite said first surface and a plurality of pores;
- a film of dielectric sensing material covering and contacting inner surfaces of said plurality of pores and said second surface, wherein the film defines an open space within the inner surfaces of the pores;
- and
- a second electrode opposite the dielectric sensing material and the porous insulating material from the first electrode.
4 more elements
A moisture sensor, comprising:
- a substrate;
- a first electrode carried on said substrate, said first electrode having a first face;
- a barrier layer having, a second thee engaging said first face and a third face opposite said second face;
- a layer of porous insulating material having a first surface engaging said third face, a second surface opposite said first surface and a plurality of pores;
- a film of dielectric sensing material covering and contacting inner surfaces of said plurality of pores and said second surface;
- and
- a second electrode opposite the dielectric sensing material and the porous insulating material from the first electrode.
4 more elements
A method of manufacturing a moisture sensor comprising:
- forming a layer of porous insulating material of a face of a first electrode;
- depositing a film of dielectric sensing material on said layer of porous insulating material including contacting inner surfaces of a plurality of pores in said layer of porous insulating material, wherein the film defines an open space within the inner surfaces of the pores;
- and
- depositing a second electrode over said film of dielectric sensing material, with the porous insulating material and the dielectric sensing material positioned between the first electrode and the second electrode.
1 more element
Dependencies are inferred from the claim text.