Method of analyzing microparticle composition and microparticle composition analyzing device

A method of obtaining a component of a microparticle composition to be analyzed, using a particle trap having a mesh-shaped structure for capturing microparticles of the microparticle composition, the method comprising:

• converging microparticles in a gas sample to form a particle beam, wherein an excess gas phase component in the gas sample is removed from the particle beam;
• capturing the microparticles in the particle beam with the particle trap having the mesh-shaped structure by irradiating a narrow region of the particle trap with the particle beam;
• and
• vaporizing, sublimating, or reacting the microparticles captured by the particle trap by performing concentrated irradiation of the narrow region of the particle trap in which the microparticles are captured with an energy beam to yield a desorbed component for analysis;
• wherein the mesh-shaped structure of the particle trap comprises (i) a front-side mesh-shaped structure having a predetermined porosity and which is disposed on a front side of the particle trap, which front side is to be irradiated with the particle beam, and (ii) a plate having no void, which is disposed on a back side of the particle trap which is a side opposite to the front side, the plate being connected to the front-side mesh-shaped structure, and
• wherein the front-side mesh-shaped structure comprises a laminate of a plurality of mesh structure substrates formed of a mesh having a grid-like opening and a support frame for supporting an outer circumference of the mesh.