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US 9,285,207 B2Granted
Linear capacitive displacement sensor
AssigneeInvenSense, Inc.
InventorsBaris Cagdaser, Du Chen, Hasan Akyol, Derek Shaeffer
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Abstract
A method and system for measuring displacement of a structure is disclosed. The method and system comprise providing a first capacitance and providing a second capacitance. The first and second capacitances share a common terminal. The method and system further include determining a difference of the inverses of the value of the first and second capacitances when the structure is displaced. The first capacitance varies in inverse relation to the displacement of the structure.
Claims11
A method for measuring displacement of a structure, comprising:
- providing a first capacitance;
- providing a second capacitance, wherein the first and second capacitances share a common terminal;
- wherein the second capacitance is a rigid capacitance attached between the common terminal and the structure;
- and
- determining a difference of the inverses of the value of the first and second capacitances when the structure is displaced;
- wherein only the first capacitance varies in inverse relation to the displacement of the structure.
3 more elements
A displacement sensor, comprising:
- a first capacitor;
- a second capacitor;
- wherein the second capacitor is a rigid capacitance attached between the common terminal and the structure;
- wherein the first and second capacitors share a common terminal;
- wherein a value of the first capacitor varies in relation to a displacement;
- and
- an amplifier coupled to the first and second capacitors;
- wherein the amplifier determines a difference of the inverses of the value of the first and second capacitances when the structure is displaced;
- wherein only the first capacitance varies in inverse relation to the displacement of the structure.
6 more elements
Dependencies are inferred from the claim text.