Hybrid inorganic-organic polymer compositions for anti-reflective coatings
AssigneeBraggone Oy
InventorAri Kärkkäinen
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Abstract
An organic-inorganic composition, which has a backbone containing —Si—O— units with chromophore groups attached directly to at least a part of the silicon atoms. The film forming composition and resulting coating properties can be tailored to suit the specific exposure wavelength and device fabrication and design requirements. By using two different chromophores the refractive index and the absorption co-efficient can be efficiently tuned and a desired Si-content of the anti-reflective coating composition can be obtained—a high Si-content will give good mechanical and thermal properties and also the required wet etch and dry etch properties.
Claims20
An organo-siloxane composition, which has a backbone containing —Si—O— units with chromophore groups attached directly to at least a part of the silicon atoms and which consists of a repeating —Si(R12)—O—Si(R22)—O— backbone, wherein each R1 is independently selected from the group of hydrogen, hydroxy, linear or branched alkyl, alkoxy, alkenyl, alkynyl, epoxy, vinyl, allyl, tolyl, anisyl, acryl, acrylate, alkyl(alk)acrylate and aryl groups, at least one of the R1s in each repeating —Si(R12)—O—Si(R22)—O— group in the —Si(R12)—O—Si(R22)—O— backbone being a polycyclic aromatic chromophore group, and wherein each R2 is independently selected from the group of hydrogen, hydroxy, alkyl, alkoxy, alkenyl, alkynyl, epoxy, vinyl, tolyl, acryl, acrylate, alkyl(alk)acrylate and aryl groups.
Dependencies are inferred from the claim text.