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US 9,284,245 B2Granted
Monomer for hardmask composition and hardmask composition including the monomer and method of forming patterns using the hardmask composition
AssigneeCheil Industries Inc.
InventorsSung-Jae Lee, Hwan-Sung Cheon, Youn-Jin Cho, Chul-Ho Lee, Chung-Heon Lee
Life of this patent
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Abstract
A monomer for a hardmask composition represented by the following Chemical Formula 1,
Claims16
A monomer for a hardmask composition, the monomer being represented by the following Chemical Formula 1:
- wherein, in the above Chemical Formula 1,
- A0 is a substituted or unsubstituted polycyclic aromatic group,
- A1 and A2 are each independently a substituted or unsubstituted C6 to C20 aromatic group,
- L1, L1′, L2 and L2′ are each independently a single bond or a substituted or unsubstituted C1 to C6 alkylene group,
- X1 and X2 are each independently hydrogen, a hydroxy group, a thionyl group, a thiol group, a cyano group, a substituted or unsubstituted amino group, a substituted or unsubstituted C1 to C30 alkyl group, a substituted or unsubstituted C1 to C20 alkylamine group, or a substituted or unsubstituted C1 to C30 alkoxy group, and
- m and n are each independently integers of 1 to 6.
3 more elements
A monomer for a hardmask composition, the monomer being represented by one of the following Chemical Formulae 1-1, 1-2, 1-3, 1-4, 1-5, or 1-6:
- wherein, in the Chemical Formulae 1-1, 1-2, 1-3, 1-4, 1-5, and 1-6,
- L1a, L1b, L1e, L1d, L1e, L1f, L2a, L2b, L2c, L2d, L2e, L2f, L1a′, L1b′, L1e′, L1d′, L1e′, L1f′, L2a′, L2b′, L2c′, L2d′, L2e′, and L2f′ are each independently a single bond or a substituted or unsubstituted C1 to C6 alkylene group,
- X1a, X1b, X1c, X1d, X1e, X1f, X2a, X2b, X2c, X2d, X2e, and X2f are each independently hydrogen, a hydroxy group, a thionyl group, a thiol group, a cyano group, a substituted or unsubstituted amino group, a substituted or unsubstituted C1 to C30 alkyl group, a substituted or unsubstituted C1 to C20 alkylamine group, or a substituted or unsubstituted C1 to C30 alkoxy group, and
- linking positions of each ring are not particularly limited.
1 more element
Dependencies are inferred from the claim text.