Graphene-like nanosheet structure network on a substrate and the method for forming the same
AssigneeNanomaterial Innovation Ltd.
InventorsLYJames Lee, Jianfeng Yu, Ying-Chieh Yen
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Abstract
A facile method to produce covalently bonded graphene-like network coated on various solid substrates is disclosed in the present invention. According to one embodiment, a combination of chemical vapor deposition (CVD) of carbon sources and a silicon compound with or without a metal containing compound under an inert gas flow is processed at high temperatures to produce covalent carbide bonding among graphene-like structures and between graphene-like structures and substrate surface.
Claims24
A method for coating a nanosheet structure network on a substrate, comprising:
- providing a substrate and a polymer, wherein the polymer is selected from one of the group and combinations thereof consisting of a Si containing compound;
- decomposing the Si containing compound in a furnace or the quartz tubes of a furnace to form a gas composition by heating at 500 to 1500° C. in an air free environment;
- providing an argon gas as a carrier to deliver a hydrocarbon compound vapor to the furnace or quartz tubes of the furnace at 500 to 1500° C., so as to form a reactive species which is the gas composition decomposed from the Si containing compound and the hydrocarbon compound vapor;
- and
- depositing the reactive species on the substrate in the furnace or quartz tubes of the furnace at 500 to 1500° C. to form a nanosheet structure network having a covalent bond to the substrate.
A method for coating a nanosheet structure network on a substrate comprising:
- providing a substrate into a furnace or quartz tubes of the furnace;
- heating the furnace or quartz tubes of the furnace at 500 to 1500° C. in an air free environment;
- providing an argon gas as a carry gas into the quartz tubes of the furnace at 500 to 1500° C. to deliver a vapor, wherein the vapor is consisting of a hydrocarbon compound and a silicon compound;
- and
- depositing the vapor on the substrate in the furnace or quartz tubes of the furnace at 500 to 1500° C. so as to form a nanosheet structure network having a covalent bond to the substrate.
Dependencies are inferred from the claim text.