MEMS device and method of making a MEMS device
AssigneeInfineon Technologies AG
InventorsAlfons Dehe, Martin Wurzer, Christian Herzum
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Abstract
A MEMS device and a method of making a MEMS device are disclosed. In one embodiment a semiconductor device comprises a substrate, a moveable electrode and a counter electrode, wherein the moveable electrode and the counter electrode are mechanically connected to the substrate. The movable electrode is configured to stiffen an inner region of the movable membrane.
Claims27
A method of making an electrode of a MEMS device, the method comprising:
- forming elongated radial openings in a mask layer, the mask layer disposed over a first sacrificial layer, the elongated radial openings exposing first surface portions of the first sacrificial layer, the elongated radial openings leading away from a center point of the first sacrificial layer;
- forming first elongated isolation regions at the exposed first surface portions;
- forming a second sacrificial layer over the first sacrificial layer;
- forming a conductive layer over the second sacrificial layer;
- removing a first portion of the first sacrificial layer forming a first spacer;
- and
- removing a second portion of the second sacrificial layer forming a second spacer.
A method of making an electrode of a MEMS device, the method comprising:
- forming first elongated isolation regions at a surface of a first sacrificial layer, wherein the first elongated isolation regions radiate away from a center point of the first sacrificial layer;
- forming a second sacrificial layer over the first sacrificial layer;
- forming a conductive layer over the second sacrificial layer;
- removing a portion of the first sacrificial layer thereby forming a first spacer;
- and
- removing a portion of the second sacrificial layer thereby forming a second spacer and thereby exposing a portion of the conductive layer.
A method of making a MEMS device, the method comprising:
- forming a moveable electrode, wherein the moveable electrode comprises radial corrugation lines radiating away from a center point of the moveable electrode;
- and
- forming a perforated counter electrode comprising first ridges, wherein the moveable electrode and the perforated counter electrode are mechanically supported by a substrate.
A method of making a movable electrode of a MEMS device, the method comprising:
- forming first elongated isolation regions at an inner region but not an outer region of a surface of a first sacrificial layer, wherein the first elongated isolation regions radiate away from a center point of the first sacrificial layer;
- removing the first elongated isolation regions thereby forming radial corrugation lines in the first sacrificial layer;
- forming a second sacrificial layer over the first sacrificial layer thereby forming the radial corrugation lines in the second sacrificial layer;
- forming a conductive layer over the second sacrificial layer thereby forming radial corrugation lines in the conductive layer;
- removing a portion of the first sacrificial layer thereby forming a first spacer;
- and
- removing a portion of the second sacrificial layer thereby forming a second spacer and thereby exposing the conductive layer and forming the movable electrode.
Dependencies are inferred from the claim text.