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US 9,283,761 B2Granted
Ink-jet recording head, recording element substrate, method for manufacturing ink-jet recording head, and method for manufacturing recording element substrate
AssigneeCanon Kabushiki Kaisha
InventorHirotaka Miyazaki
Life of this patent
Estimating the term…
Abstract
An ink-jet recording head includes a plurality of recording element substrates each having an ejection pressure generating element configured to generate pressure for ejecting ink from an ink discharge port. The plurality of recording element substrates each include a first surface on which the corresponding ejection pressure generating element is disposed and a second surface, serving as an end surface intersecting with the first surface, being at least partially formed by etching.
Claims6
A method for manufacturing a plurality of recording element substrates, the method comprising:
- preparing a silicon wafer to include the plurality of recording element substrates, each recording element substrate including energy generating element groups for generating energy used for ejecting a liquid;
- and
- dividing, by dry etching, the silicon wafer so as to separate the recording element substrates from each other, each recording element substrate including the energy generating element groups.
Dependencies are inferred from the claim text.