Liquid ejecting head, liquid ejecting apparatus, piezoelectric element, and ultrasonic sensor
AssigneeSeiko Epson Corporation
InventorsNoboru Furuya, Masao Nakayama
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AssigneeSeiko Epson Corporation
InventorsNoboru Furuya, Masao Nakayama
Estimating the term…
A liquid ejecting head which includes a piezoelectric element which includes a first electrode, a piezoelectric layer which is provided on the first electrode, and on which a plurality of piezoelectric films are laminated, a second electrode which is provided on the piezoelectric layer, and a plurality of active units which are interposed between the first electrode and the second electrode, and a pressure generating chamber which communicates with nozzle openings which eject liquid, and in which a pressure fluctuation is generated by the piezoelectric element, in which a plurality of grooves with inner faces facing the first electrode side are formed on a side surface of the piezoelectric layer on each interface of each of the piezoelectric films along a first direction and a second direction which cross a third direction which goes from the first electrode to the second electrode.
A liquid ejecting head comprising:
A piezoelectric element comprising:
Dependencies are inferred from the claim text.