Method for processing an embedded metal film
AssigneeBerliner Glas KGaA Herbert Kubatz GmbH & Co.
InventorJan Ingwersen
Life of this patent
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Abstract
A method for processing a metal film (1) embedded in a carrier (2) includes the step of heating the metal film (1) in such a way that the metal film (1) is transformed in a subregion into at least one insulator section (3). The metal film (1) is preferably locally heated by laser radiation (4). Also described is a component (10, 11, 12, 13) which is produced by the method and includes an electrostatic clamp, a drive mechanism which is adapted for moving a workpiece under the action of electrical fields, a resistor element or a display device, for example.
Claims6
A method for producing a holding carrier of an electrostatic clamp having at least two planar electrodes which are suitable for having an electrostatic clamping voltage applied thereto, said method comprising the steps of:
- providing the holding carrier by anodic bonding of two electrically insulating carrier elements, wherein at least one of the carrier elements is transparent, and a bonding electrode metal film is arranged between the carrier elements such that the bonding electrode metal film is embedded in the holding carrier, and
- locally heating the bonding electrode metal film embedded in the holding carrier by laser radiation in such a way that the bonding electrode metal film is transformed in a portion into at least one insulator section, wherein
- the at least two planar electrodes of the electrostatic clamp are created by dividing the bonding electrode metal film into at least two portions being separated from one another by the at least one insulator section, and
- the locally heating step comprises moving the holding carrier and an optical path of the laser radiation relative to one another to transform the bonding electrode metal film into the at least one insulator section along a line or an area.
Dependencies are inferred from the claim text.