Micro-plasma field effect transistors
AssigneeUniversity of Utah Research Foundation
InventorMassood Tabib-Azar
Life of this patent
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Abstract
In some aspects, a micro-plasma device comprises a plasma gas enclosure containing at least one plasma gas, and a plurality of electrodes interfaced with the plasma gas enclosure. In other aspects, a micro-plasma circuitry apparatus comprises a first layer having a cavity formed therein and a second layer having a circuit formed therein. The circuit includes a micro-plasma circuit (“MPC”) that includes one or more micro-plasma devices (“MPDs”). The first layer of the circuit is bonded to the second layer of the circuit thereby forming an enclosure that contains at least one plasma gas. An excitation voltage is applied to a drain electrode of the MPDs to generate a conductive plasma path between the drain electrode and a source electrode.
Claims34
A micro-plasma device, comprising:
- a plasma gas enclosure containing at least one plasma gas;
- a drain electrode interfaced with the plasma gas enclosure;
- and
- a source electrode interfaced with the plasma gas enclosure,
- wherein the drain electrode and the source electrode are separated from each other by a distance,
- wherein the micro-plasma device is configured, when a voltage signal having a value greater than a breakdown voltage of the plasma gas between the drain electrode and the source electrode is applied to the drain electrode, to generate a conductive plasma path through the at least one plasma gas between the drain electrode and the source electrode.
A micro-plasma circuitry apparatus, comprising:
- a first layer having a cavity formed therein;
- and
- a second layer having a circuit formed therein including a micro-plasma circuit (“MPC”) that includes one or more micro-plasma devices (“MPDs”),
- wherein the first layer is bonded to the second layer to form an enclosure that contains a plasma gas.
Dependencies are inferred from the claim text.