Back to results
US 9,266,258 B2Granted
System, method and apparatus for manufacturing magnetic recording media
AssigneeHGST Netherlands B.V.
InventorsClayton P. Henderson, Tsai-Wei Wu, Xing-Cai Guo, Thomas Edward Karis, Jeffrey S. Lille
Life of this patent
Estimating the term…
Abstract
A system, method and apparatus for manufacturing high density magnetic media is disclosed. A flexible mold having a very low modulus of less than about 4 GPa is made on a rigid support. The mold nano-imprints a resist material on disks for hard disk drives. The flexible mold may comprise a perfluoropolyether with urethane acrylate end groups with a low surface adhesion from which the cured resist is easily released.
Claims6
An imprint mold for manufacturing magnetic recording media, comprising:
- a rigid support material that is UV-transparent and has a flat surface;
- a flexible mold layer on the rigid support material and having a Young's modulus of less than about 4 GPa, the flexible mold layer comprising a perfluoropolyether (PFPE) material with a urethane acrylate (UA) end group, and the flexible mold layer has a topography that forms a pattern that is precise such that one standard deviation of patterned dimensions is less than 1 nm;
- the flexible mold layer further comprises alignment targets for aligning the imprint mold with a substrate based on the alignment targets;
- and
- the flexible mold layer has a surface energy of less than 20 mN/m.
2 more elements
Dependencies are inferred from the claim text.