Resonator electrode shields

A method of operation within a microelectromechanical system (MEMS) resonator, the method comprising:

• providing a time-varying signal to a first drive electrode to generate a time-varying electrostatic force that causes a first resonator beam to oscillate in a resonant mode, the first resonator beam extending from a support element of the MEMS resonator;
• generating, in a first sense electrode responsive to oscillation of the first resonator beam, a timing reference signal having a frequency corresponding to the oscillation frequency of the first resonator beam;
• and
• conducting a first induced current to a reference voltage node via a first doped semiconductor shielding structure physically disposed between the first drive electrode and the first sense electrode.

A microelectromechanical system (MEMS) resonator comprising:

• a resonant semiconductor structure including a resonator beam that extends from a support element;
• means for generating, within a drive electrode, a time-varying electrostatic force that causes the resonator beam to oscillate in a resonant mode;
• means for generating, in a sense electrode responsive to oscillation of the resonator beam, a timing reference signal having a frequency corresponding to the oscillation frequency of the resonator beam;
• and
• conductive shielding means, physically disposed between the drive electrode and the sense electrode, for conducting a first induced current to a reference voltage node.