Resonator assembly comprising a silicon resonator and a quartz resonator
AssigneeHRL Laboratories, LLC
InventorsRandall L. Kubena, David T. Chang
Life of this patent
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Abstract
A resonator assembly comprising a semiconductor substrate, a resonator gyroscope, the resonator gyroscope including a first resonator formed in a layer of a first material, and an oscillator on the semiconductor substrate, the oscillator including a second resonator formed of a second material, wherein the second resonator is attached in a cavity; the cavity comprising a first recess in said layer of a first material and the edges of the first recess being attached to the substrate, or the cavity comprising a second recess in said substrate and the edges of the second recess being attached to said layer of a first material.
Claims27
A resonator assembly comprising:
- a semiconductor substrate;
- a resonator gyroscope, the resonator gyroscope including a first resonator formed in a layer of a first material;
- and
- an oscillator on the semiconductor substrate, the oscillator including a second resonator formed of a second material;
- the second resonator being attached in a cavity;
- the cavity comprising a first recess in said layer of a first material and the edges of the first recess being attached to the substrate, or the cavity comprising a second recess in said substrate and the edges of the second recess being attached to said layer of a first material;
- said first resonator being formed by etching said layer of a first material after said attaching the edges of the first recess to the substrate or said attaching the edges of the second recess to said layer of a first material;
- and
- said cavity being located below a portion of said layer of a first material that is not etched when forming said first resonator.
A resonator assembly comprising:
- a semiconductor substrate;
- a resonator gyroscope, the resonator gyroscope including a first resonator formed in a layer of a first material;
- and
- an oscillator on the semiconductor substrate, the oscillator including a second resonator formed of a second material;
- the second resonator being attached in a cavity, the cavity comprising a first recess in said layer of a first material and the edges of the first recess being attached to the substrate, or the cavity comprising a second recess in said substrate and the edges of the second recess being attached to said layer of a first material, wherein the first resonator comprises a central mounting stem, and wherein the cavity is located in said central mounting stem.
A fabrication process for a resonator assembly, the process comprising:
- providing a semiconductor substrate;
- providing a layer of a first material;
- etching at least part of a cavity in said layer of first material or in said substrate;
- attaching an oscillator on the semiconductor substrate, the oscillator including a first resonator formed of a second material;
- and assembling said layer of first material on said substrate such that the first resonator is enclosed in said cavity;
- the process further comprising:
- forming a second resonator out of said layer of a first material by further etching said layer of a first material after said assembling, wherein said cavity is located below a portion of said layer of a first material that is not etched by said further etching.
Dependencies are inferred from the claim text.