Micromachined monolithic 3-axis gyroscope with single drive

An inertial measurement system, comprising:

• a device layer including a single proof-mass 3-axis gyroscope formed in an x-y plane, the single proof-mass 3-axis gyroscope including:
• a main proof-mass section suspended about a single, central anchor, the main proof-mass section including a radial portion extending outward towards an edge of the 3-axis gyroscope sensor;
• a central suspension system configured to suspend the 3-axis gyroscope from the single, central anchor;
• a drive electrode including a moving portion and a stationary portion, the moving portion coupled to the radial portion, wherein the drive electrode and the central suspension system are configured to oscillate the 3-axis gyroscope about a z-axis normal to the x-y plane at a drive frequency;
• symmetrical x-axis proof-mass sections configured to move anti-phase along the x-axis in response to z-axis angular motion;
• and
• a z-axis gyroscope coupling flexure bearing configured to couple the x-axis proof mass sections and to resist in-phase motion between the x-axis proof mass sections;
• a cap wafer bonded to a first surface of the device layer;
• and
• a via wafer bonded to a second surface of the device layer, wherein the cap wafer and the via wafer are configured to encapsulate the single proof-mass 3-axis gyroscope.