Segmented silicon carbide liner
AssigneeREC Silicon Inc
InventorsE. Wayne Osborne, Matthew J. Miller, Michael V. Spangler, Gerald A. Zeininger, William J. Onstot, Walter J. Stupin
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Abstract
Segmented silicon carbide liners for use in a fluidized bed reactor for production of polysilicon-coated granulate material are disclosed, as well as methods of making and using the segmented silicon carbide liners. Non-contaminating bonding materials for joining silicon carbide segments also are disclosed. One or more of the silicon carbide segments may be constructed of reaction-bonded silicon carbide.
Claims21
A segmented silicon carbide liner for use in a fluidized bed reactor for production of polysilicon-coated granulate material, the liner comprising:
- at least one tubular wall having a cylindrical outer surface and comprising a plurality of laterally joined silicon carbide segments, each laterally joined silicon carbide segment having lateral edges and an outer surface that is a portion of the outer surface of the tubular wall;
- and
- a volume of bonding material comprising a lithium salt, the bonding material disposed between abutting lateral edges of adjacent silicon carbide segments.
Dependencies are inferred from the claim text.