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US 9,236,877 B2Granted
Micro-electro-mechanical systems (MEMS), systems, and operating methods thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYung-Chow Peng, Wen-Hung Huang, Yu-Wei Lin
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Abstract
A micro-electro-mechanical system (MEMS) includes a micro-mechanical structure that generates a first electrical signal. An analog-to-digital converter (ADC) is coupled with the micro-mechanical structure. The first electrical signal is converted to a second electrical signal using a converter coupled between the micro-mechanical structure and the ADC. The first electrical signal is free from being amplified.
Claims20
A method comprising:
- generating a first electrical signal using a micro-mechanical structure;
- converting the first electrical signal to a second electrical signal using a converter coupled between the micro-mechanical structure and an analog-to-digital converter (ADC) coupled with the micro-mechanical structure;
- and
- interpolating at least one datum between the first electrical signal and the second electrical signal based on a clock signal,
- wherein the first electrical signal is free from being amplified.
2 more elements
A micro-electro-mechanical system (MEMS) comprising:
- a micro-mechanical structure that is capable of generating a first electrical signal;
- an analog-to-digital converter (ADC) coupled with the micro-mechanical structure to convert the first electrical signal to at least one digital signal, the first signal being free from being amplified;
- an interpolation filter coupled with the ADC, the interpolation filter being capable of smoothing digital signals output from the ADC;
- and
- a clock switch coupled with the interpolation filter,
- wherein the interpolation filter is capable of receiving a clock signal from the clock switch.
3 more elements
An apparatus comprising:
- at least one processor;
- and
- at least one memory including computer program code for one or more programs,
- the at least one memory and the computer program code configured to, with the at least one processor, cause the apparatus to:
- generate a first electrical signal via a micro-mechanical structure;
- analog-to-digitally convert the first electrical signal to a second electrical signal;
- and
- interpolate at least one datum between the first electrical signal and the second electrical signal based on a clock signal;
- wherein the first electrical signal is free from being amplified.
6 more elements
Dependencies are inferred from the claim text.