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US 9,233,843 B2Granted
Method for manufacturing a structured surface
AssigneeRobert Bosch GmbH
InventorAndrea Urban
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Abstract
A method is described for manufacturing a micromechanical structure, in which a structured surface is created in a substrate by an etching method in a first method step, and residues are at least partially removed from the structured surface in a second method step. In the second method step, an ambient pressure for the substrate which is lower than 60 Pa is set and a substrate temperature which is higher than 150° C. is set.
Claims14
A method for manufacturing a micromechanical structure, comprising:
- creating a structured surface in a substrate by an etching method;
- and
- at least partially removing residues from the structured surface;
- during the removing step, setting an ambient pressure for the substrate that is lower than 60 Pa and setting a substrate temperature that is higher than 150° C., wherein O2, H2, N7, forming gas or ammonia is supplied during the removing step.
1 more element
Dependencies are inferred from the claim text.