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AssigneeApplied Materials, Inc.
InventorsMichael S. Cox, Rongping Wang, Brian T. West, Roger M. Johnson, Colin John Dickinson
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Embodiments disclosed herein include a plasma source for abating compounds produced in semiconductor processes. The plasma source has a first plate and a second plate parallel to the first plate. An electrode is disposed between the first and second plates and an outer wall is disposed between the first and second plates surrounding the cylindrical electrode. The plasma source has a first plurality of magnets disposed on the first plate and a second plurality of magnets disposed on the second plate. The magnetic field created by the first and second plurality of magnets is substantially perpendicular to the electric field created between the electrode and the outer wall. In this configuration, a dense plasma is created.
A plasma source, comprising:
A plasma source, comprising:
A plasma source, comprising:
Dependencies are inferred from the claim text.