Methods for fabricating magnetic transducers using post-deposition tilting
AssigneeGlobalfoundries Inc.
InventorsRobert Glenn Biskeborn, Laurent Dellmann, Michel Despont, Philipp Herget, Pierre-Olivier Jubert
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Abstract
In one general embodiment, a method is provided for fabricating magnetic structures using post-deposition tilting. A thin film magnetic transducer structure is formed on a substantially planar portion of a substrate such that a plane of deposition of the thin film transducer structure is substantially parallel to a plane of the substrate. Additionally, the thin film transducer structure is caused to tilt at an angle relative to the plane of the substrate. The thin film transducer is fixed at the angle after being tilted.
Claims17
A method, comprising:
- forming a thin film magnetic transducer structure on a substantially planar portion of a substrate such that a plane of deposition of the thin film magnetic transducer structure is substantially parallel to a plane of the substrate;
- and
- causing the thin film transducer structure to tilt at an angle relative to the plane of the substrate, wherein the thin film magnetic transducer structure is fixed at the angle after being tilted, wherein the angle is in a range from greater than 0 degrees to less than or equal to 90 degrees;
- and
- removing a sacrificial portion of the substrate for causing the thin film magnetic transducer structure to pivot.
A method, comprising:
- forming a magnetic transducer structure on a substantially planar potion of a substrate such that a plane of deposition of the magnetic transducer structure is substantially parallel to a plane of the substrate;
- causing the magnetic transducer structure to tilt at an angle relative to the plane of the substrate;
- and
- applying an external force for causing the magnetic transducer structure to tilt at the angle,
- wherein the thin film magnetic transducer structure is a magnetic writer.
A method, comprising:
- forming a magnetic transducer on a substantially planar potion of a substrate such that a plane of deposition of the magnetic transducer is substantially parallel to a plane of the substrate;
- causing the magnetic transducer to tilt at an angle relative to the plane of the substrate, wherein capillary action operatively causes the thin film magnetic transducer structure to tilt at the angle;
- and
- after causing the magnetic transducer to tilt at the angle, depositing a filling material on at least a portion of the magnet transducer and at least a portion of the substrate, the filling material being configured to fix the magnetic transducer in place on the substrate at the angle.
Dependencies are inferred from the claim text.