Nonlinear optical crystals and their manufacture and use

A nonlinear optical crystal for use with a laser to generate a laser beam, the nonlinear optical crystal having a formula YAl3(BO3)4, a volume greater than about 0.1 mm3 and comprising less than about 100 ppm by weight of any element that inhibits the ability of the nonlinear optical crystal to generate and/or emit light at wavelengths less than about 300 nm.

A YAl3(BO3)4 nonlinear optical crystal for use with a laser to generate a laser beam, the YAl3(BO3)4 nonlinear optical crystal having a volume greater than about 1 mm3 and being capable of converting an input laser beam of a first wavelength into an output laser beam of a second wavelength, where the second wavelength is less than about 200 nm.

A method of generating a laser beam, comprising:

• selecting a nonlinear optical crystal having a formula (Y1-xLux)Al3(BO3)4 where X=0-1, a volume greater than about 0.1 mm3 and comprising less than about 100 ppm by weight of any element that inhibits the ability of the nonlinear optical crystal to generate and/or emit light at wavelengths less than about 300 nm;
• and
• directing an input laser beam at the nonlinear optical crystal to generate and/or emit an output laser beam exiting the nonlinear optical crystal, where the output laser beam has a wavelength less than about 300 nm.

A method, comprising:

• directing an input laser beam at a nonlinear optical crystal to generate and/or emit an output laser beam having a wavelength less than about 300 nm, the nonlinear optical crystal having a formula (Y1-xLux)Al3(BO3)4 where X=0-1, a volume greater than about 0.1 mm3 and comprising less than about 100 ppm by weight of any element that inhibits the ability of the nonlinear optical crystal to generate and/or emit light at wavelengths less than about 300 nm;
• and
• directing the output laser beam at a substrate to detect anomalies on the surface of the substrate.

A method, comprising:

• directing an input laser beam at a nonlinear optical crystal to generate and/or emit an output laser beam having a wavelength less than about 300 nm, the nonlinear optical crystal having a formula (Y1-xLuxAl3(BO3)4 where X=0−1, volume greater than about 0.1 mm3 and comprising less than about 100 ppm by weight of any element that inhibits the ability of the nonlinear optical crystal to generate and/or emit light at wavelengths less than about 300 nm;
• and
• directing the output laser beam at a substrate to bore a hole in the substrate.