Nano-electro-mechanical based memory
AssigneesImec Vzw, Katholieke Universiteit Leuven
InventorsStefan Cosemans, Ann Witvrouw, Maliheh Ramezani
Life of this patent
Estimating the term…
Loading patent…
AssigneesImec Vzw, Katholieke Universiteit Leuven
InventorsStefan Cosemans, Ann Witvrouw, Maliheh Ramezani
Estimating the term…
A non-volatile memory arrangement comprising a plurality of cells is disclosed. In one aspect, each cell comprises a memory element and a read selector in series. Further, the memory element is a nano-electro-mechanical switch comprising an anchor, a beam fixed to the anchor, a first and second control gate, for controlling the position of the beam, a first output node against which the beam can be positioned. The cell also comprises a read selector comprising a first selector terminal, a second selector terminal, the first selector terminal connected to the first output node. The first respectively second control gates of switches of a same word are connected together by a first respectively second write word line serving as control gate.
A memory arrangement comprising a plurality of cells arranged in an array structure, wherein each cell comprises:
Dependencies are inferred from the claim text.