Method for scheduling single-arm cluster tools with wafer revisiting and residency time constraints

A non-transitory computer-readable medium whose contents cause a computing system to perform a computer implemented method for scheduling a single-arm cluster tool with wafer revisiting process and residency time constraints, the method comprising:

• obtaining, by a processor, a wafer processing time, a wafer residency time, a robot task time for loading/unloading a wafer, and a robot task time for robot's moving;
• determining, by a processor, a cycle time for the wafer revisiting process based on the wafer processing time, the robot task time for loading/unloading the wafer, and the robot task time for robot's moving;
• determining, by a processor, a cycle time of system based on the wafer processing time, the robot task time for loading/unloading the wafer, and the robot task time for robot's moving;
• determining, by a processor, a case of an algorithm from a plurality of defined cases of algorithms based on the wafer processing time, the determined cycle time for the wafer revisiting process, and the determined cycle time of system;
• determining, by a processor, a robot scheduling strategy based on the determined case of the algorithm, wherein the robot scheduling strategy comprises a plurality of basic activity sequences;
• determining, by a processor, a robot waiting time based on the wafer residency time and the determined case of the algorithm;
• and
• generating, by a processor, a schedule based on the determined robot scheduling strategy and the determined robot waiting time.