Glass fine particle synthesis burner, glass fine particle deposition body manufacturing method, and glass fine particle deposition apparatus
AssigneeShin-Etsu Chemical Co., Ltd.
InventorYuhei Urata
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AssigneeShin-Etsu Chemical Co., Ltd.
InventorYuhei Urata
Estimating the term…
A glass fine particle synthesis burner comprising a glass raw material gas emission path for emitting glass raw material; a ring-shaped combustible gas emission path for emitting combustible gas arranged outside the glass raw material emission path; a ring-shaped combustion aiding gas emission path for emitting combustion aiding gas arranged outside the combustible gas emission path; and small diameter nozzles for emitting the combustion aiding gas within the combustible gas emission path. In a cross section of the glass fine particle synthesis burner formed by cleaving orthogonal to a central axis thereof, when the glass fine particle synthesis burner is divided into two regions by a predetermined straight line passing through a center of the glass fine particle synthesis burner, a total area of the small diameter nozzles in one of the regions is greater than a total area of the small diameter nozzles in the other region.
A glass fine particle synthesis burner that is supplied with a glass raw material gas, a combustible gas, and a combustion aiding gas and blows glass fine particles refined in a flame to deposit the glass fine particles on a starting member, the glass fine particle synthesis burner comprising:
A method of manufacturing a glass fine particle deposition body, comprising:
Dependencies are inferred from the claim text.