# US 9,219,219 B2 · Oscillation structure of micro actuator > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 9,219,219 B2 - Document ID: US9219219B2 - Status: Granted - Kind: B2 - Application number: 13/952,101 - Filed: 2013-07-26 - Published: 2014-01-30 - Granted: 2015-12-22 - Earliest claimed: 2012-07-30 - Assignees: Opus Microsystems Corporation - Applicants: Opus Microsystems Corporation - Inventors: Yen-han Lai; Ta-wei Lin; Chang-li Hung - Web page: https://patentgrep.com/patent/US9219219B2 ## CPC - B81B 3/0021: {Transducers for transforming electrical into mechanical energy or vice versa (dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00)} - B81B 3/0045: {Improve properties related to angular swinging, e.g. control resonance frequency} - G02B 26/0833: {the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B)} - G02B 26/105: {with one or more pivoting mirrors or galvano-mirrors (G02B26/101 takes precedence)} - B81B 2201/042: Micromirrors, not used as optical switches - B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00) - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS ## Abstract An oscillation structure of micro actuator is described. In the oscillation structure, a pair of torsion bars is disposed along a first axis perpendicular to a second axis. The first frame is connected to the pair of torsion bars wherein the torsion bars are disposed on the outer periphery of a first frame along the first axis and a second frame is disposed inside the first frame. Each of the first connection members connects the first frame to the second frame therebetween, and each of the second connection members connects the second frame to the oscillation body therebetween such that the first frame, the second frame and the oscillation body are allowed to rotate about the first axis by the torsion bars as a structure assemblies at an identical angle. The oscillation structure effectively reduces the dynamic deformation of micro actuator. ## Claims ### Claim 1 An oscillation structure applicable to a micro actuator, the oscillation structure comprising: a pair of torsion bars disposed in a first axis perpendicular to a second axis; a first frame coupled to the pair of torsion bars wherein the pair of torsion bars is disposed in an outer periphery of the first frame along the first axis; a second frame disposed inside the first frame; an oscillation body disposed inside the second frame; at least four first connection members coupling the first frame to the second frame therebetween, wherein a pair of the first connection members of the first connection members is aligned to the first axis in a collinear manner; at least four second connection members coupling the second frame to the oscillation body therebetween, wherein a pair of the second connection members of the second connection members is aligned to the first axis in a collinear manner to allow the first frame, the second frame and the oscillation body to rotate about the first axis by the pair of torsion bars. ### Claim 2 (depends on 1) The oscillation structure of claim 1, wherein the first frame, the second frame and the oscillation body connected by the first and the second connection members are allowed to rotate as a structure assemblies at an identical angle about the first axis. ### Claim 3 (depends on 1) The oscillation structure of claim 1, wherein the width of the first frame is either less than or equal to the width of the second frame. ### Claim 4 (depends on 1) The oscillation structure of claim 1, wherein another pair of the first connection members of the first connection members is aligned to the second axis in a collinear manner. ### Claim 5 (depends on 1) The oscillation structure of claim 1, wherein another pair of the first connection members of the first connection members is not aligned to the second axis in a collinear manner. ### Claim 6 (depends on 1) The oscillation structure of claim 1, wherein another pair of the second connection members of the second connection members is aligned to the second axis in a collinear manner. ### Claim 7 (depends on 1) The oscillation structure of claim 1, wherein another pair of the second connection members of the second connection members is not aligned to the second axis in a collinear manner. ### Claim 8 (depends on 1) The oscillation structure of claim 1, further comprising a gimbal frame, wherein an inward edge of the gimbal frame is connected to the pair of torsion bars. ### Claim 9 (depends on 8) The oscillation structure of claim 8, wherein an outward edge of the gimbal frame is connected to a second pair of torsion bars along the second axis to allow the gimbal frame to rotate about the second axis by the second pair of torsion bars. ### Claim 10 An oscillation structure applicable to a micro actuator, the oscillation structure comprising: a pair of torsion bars disposed in a first axis perpendicular to a second axis; a first frame coupled to the pair of torsion bars wherein the pair of torsion bars is disposed in an outer periphery of the first frame along the first axis; a second frame disposed inside the first frame; an oscillation body disposed inside the second frame; at least four first connection members coupling the first frame to the second frame therebetween; at least four second connection members coupling the second frame to the oscillation body therebetween, wherein the first frame, the second frame and the oscillation body rotate about the first axis by the pair of torsion bars. ### Claim 11 (depends on 10) The oscillation structure of claim 10, wherein the first frame, the second frame and the oscillation body connected by the first and the second connection members are allowed to rotate as a structure assemblies at an identical rotation angle about the first axis. ### Claim 12 (depends on 10) The oscillation structure of claim 10, wherein the width of the second frame is either less than or equal to the width of the first frame. ### Claim 13 (depends on 10) The oscillation structure of claim 10, wherein at least one pair of the first connection members is aligned to the first axis in a collinear manner. ### Claim 14 (depends on 10) The oscillation structure of claim 10, wherein at least one pair of the first connection members is aligned to the second axis in a collinear manner. ### Claim 15 (depends on 10) The oscillation structure of claim 10, wherein at least one pair of the second connection members is aligned to the first axis in a collinear manner. ### Claim 16 (depends on 15) The oscillation structure of claim 15, wherein another pair of second connection members of the second connection members is aligned to the second axis in a collinear manner. ### Claim 17 (depends on 10) The oscillation structure of claim 10, wherein at least one pair of the first connection members is not aligned to the first axis and the second axis in a collinear manner. ### Claim 18 (depends on 17) The oscillation structure of claim 17, wherein another pair of the first connection members is not aligned to the first axis and the second axis in a collinear manner. ### Claim 19 (depends on 10) The oscillation structure of claim 10, wherein at least one pair of the second connection members is not aligned to the first axis and the second axis in a collinear manner. ### Claim 20 (depends on 19) The oscillation structure of claim 19, wherein another pair of the second connection members is not aligned to the first axis and the second axis in a collinear manner. ### Claim 21 (depends on 10) The oscillation structure of claim 10, further comprising a gimbal frame, wherein an inward edge of the gimbal frame is connected to the pair of torsion bars. ### Claim 22 (depends on 21) The oscillation structure of claim 21, wherein an outward edge of the gimbal frame is connected to a second pair of torsion bars along the second axis to allow the gimbal frame to rotate about the second axis by the second pair of torsion bars.