US 9,212,899 B2Granted

Imaging, fabrication and measurement systems and methods

AssigneeAscentia Imaging, Inc.

InventorsGreg Johnson, Ed Dowski, Brad Sissom

Life of this patent

Estimating the term…

Loading patent…

Abstract

A fabrication system comprises one of a substrate and work piece having at least one working surface, a tool coupled to a tool holder, at least one measurement system, and a control system. The at least one working surface comprises one or more regions. A first location of the tool, tool holder, and the one of a substrate and work piece are calibrated with reference to a coordinate system. The tool is adapted to affect creation of a device within the one or more regions. The at least one measurement system is adapted to obtain location information of at least a portion of at least one of the tool, tool holder, and one of a substrate and a work piece. The control system is adapted to receive the location information, determine a second location, and provide one or more output signals to one or more adjustment devices.

Claims10

Dependent claims

A measurement system comprising,

a first set of a plurality of imaging channels having overlapping fields of view, wherein each imaging channel of the first set of plurality of imaging channels provides a difference in intensity verses an angular position of at least one first measured object and comprises,
infinity corrected and intensity coded optics adapted to receive light comprising information about the at least one first measured object, the infinity corrected and intensity coded optics comprising an exit pupil,
a micro lens array adapted to receive at least a portion of the light from the exit pupil and emit focused light, and
one or more electromagnetic energy detectors adapted to receive the emitted focused light from the micro lens array;
and
at least one second set of plurality of imaging channels having overlapping fields of view, wherein each imaging channel of the at least one second set of plurality of imaging channels provides a difference in intensity verses an angular position of at least one second measured object and comprises,
infinity corrected and intensity coded optics adapted to receive light comprising information about the at least one second measured object, the infinity corrected and intensity coded optics comprising an exit pupil,
a micro lens array adapted to receive at least a portion of the light from the exit pupil and emit focused light, and
one or more electromagnetic energy detectors adapted to receive the emitted focused light from the micro lens array.

6 more elements

Dependencies are inferred from the claim text.

Facts

Application: 13/233,563Filed 15 Sep 2011 · us provisional application
Priority: 15 Sep 2010
Published: US 2012/0062708 A115 Mar 2012
Granted: 15 Dec 2015
Term ends: Not estimatedThe source records don’t support an estimate.

Classification11 codes

G01B 11/03
For measuring length, width or thickness: by measuring coordinates of points
G03F 9/7042
Alignment type or strategy, e.g. leveling, global alignment: alignment for lithographic apparatus using patterning methods other than those…
G02B 13/0035
Having at least one aspherical surface: having three lenses
G02B 13/008
Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras: designed for infrared light

Family

Application61/403,396Us provisional application · filed 15 Sep 2010
Application61/571,205Us provisional application · filed 22 Jun 2011
Application61/574,776Us provisional application · filed 9 Aug 2011
Application61/574,910Us provisional application · filed 11 Aug 2011
US 2012/0062708 A1Pre-grant publication · published 15 Mar 2012
US 9,212,899 B2This patent

From the US filing history. Foreign family members aren’t listed.