Heat treated ceramic substrate having ceramic coating and heat treatment for coated ceramics
AssigneeApplied Materials, Inc.
InventorsJennifer Y. Sun, Ren-Guan Duan, Biraja P. Kanungo, Dmitry Lubomirsky
Life of this patent
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Abstract
A ceramic article having a ceramic substrate and a ceramic coating with an initial porosity and an initial amount of cracking is provided. The ceramic article is heated to a temperature range between about 1000° C. and about 1800° C. at a ramping rate of about 0.1° C. per minute to about 20° C. per minute. The ceramic article is heat treated at one or more temperatures within the temperature range for a duration of up to about 24 hours. The ceramic article is then cooled at the ramping rate, wherein after the heat treatment the ceramic coating has a reduced porosity and a reduced amount of cracking.
Claims15
A method comprising:
- performing a thermal spraying process to form a ceramic coating comprising Y4Al2O9 and solid solution of Y2O3—ZrO2 on a ceramic substrate comprising Al2O3, wherein the ceramic coating has an initial porosity and an initial amount of cracking;
- heating a ceramic article comprising the ceramic substrate and the ceramic coating to a temperature range between about 1000° C. and about 1800° C. at a ramping rate of about 0.1° C. per minute to about 20° C. per minute;
- heat treating the ceramic article at one or more temperatures within the temperature range for a duration of up to about 24 hours to reduce a porosity and an amount of cracking of the ceramic coating, wherein the ceramic article is heat treated at below a sintering temperature for the ceramic coating to prevent sintering of the ceramic coating, and wherein the heat treating causes the ceramic coating comprising Y4Al2O9 and the solid solution of Y2O3—ZrO2 to react with the ceramic substrate comprising Al2O3 to form a transition layer between the ceramic substrate and the ceramic coating, the transition layer comprising Y3Al5O12;
- and
- cooling the ceramic article at the ramping rate after the heat treatment.
A method comprising:
- receiving a heat treated ceramic article comprising a ceramic substrate and a ceramic coating that has been used in a plasma etch process, wherein the ceramic coating has an initial surface defect density caused by the plasma etch process;
- heating the ceramic article to a temperature range between about 1000° C. and about 1800° C. at a ramping rate of about 0.1° C. per minute to about 20° C. per minute;
- heat treating the ceramic article at one or more temperatures within the temperature range for a duration of up to about 24 hours to reduce a porosity and an amount of cracking of the ceramic coating;
- and
- cooling the ceramic article at the ramping rate after the heat treatment, wherein after completing the heat treating the heat treated ceramic article has a new surface defect density level below the surface defect density level caused by the plasma etch process.
Dependencies are inferred from the claim text.